JPH0412412Y2 - - Google Patents
Info
- Publication number
- JPH0412412Y2 JPH0412412Y2 JP1693384U JP1693384U JPH0412412Y2 JP H0412412 Y2 JPH0412412 Y2 JP H0412412Y2 JP 1693384 U JP1693384 U JP 1693384U JP 1693384 U JP1693384 U JP 1693384U JP H0412412 Y2 JPH0412412 Y2 JP H0412412Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- sample holder
- measuring machine
- length measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000001105 regulatory effect Effects 0.000 claims description 12
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 3
- 230000033228 biological regulation Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1693384U JPS60129605U (ja) | 1984-02-09 | 1984-02-09 | 電子ビ−ム測長機等の試料ホルダ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1693384U JPS60129605U (ja) | 1984-02-09 | 1984-02-09 | 電子ビ−ム測長機等の試料ホルダ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60129605U JPS60129605U (ja) | 1985-08-30 |
| JPH0412412Y2 true JPH0412412Y2 (en]) | 1992-03-25 |
Family
ID=30504167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1693384U Granted JPS60129605U (ja) | 1984-02-09 | 1984-02-09 | 電子ビ−ム測長機等の試料ホルダ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60129605U (en]) |
-
1984
- 1984-02-09 JP JP1693384U patent/JPS60129605U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60129605U (ja) | 1985-08-30 |
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